ZYGO ZMI 4104 Measurement Board

ZYGO ZMI 4104
Brand: ZYGO (Ametek Zygo Corporation)
Model: ZMI 4104
Product Name: ZMI™ 4-Axis VME64x Laser Interferometer Displacement Measurement Board
Country of Origin: United States
HS Code: 85437099 (Industrial precision optical metrology electronic board, for reference only; confirm with customs broker before formal declaration)
Dimensions: 185 mm × 135 mm × 28 mm
Net Weight: 0.68 kg

VMF-MPC4 200-510-111-034 200-510-070-113

Technical Specifications & Features
Hardware Form Factor: 6U VME64x standard card, equipped with fiber optic input ports and rear VME bus connector.
Measurement Configuration: 4 independent synchronous measurement axes per board.
Position Resolution: 0.15 nm; Maximum measurable speed: ±2.55 m/s; Measurement precision (σ) reaches 0.2 nm under maximum speed condition.
Minimum Receiving Optical Power: 0.07 µW, suitable for long-distance optical path measurement.
Compatible Laser Sources: ZYGO 7702, 7714, 7724 series helium-neon laser heads.
Power Requirement: 24 VDC power supply with ±10% voltage tolerance, maximum power consumption 45 W.
Operating Temperature Range: 0°C ~ +50°C; Recommended working temperature for precision measurement: 15°C ~ 35°C; Storage temperature: -40°C ~ +70°C.
Humidity Condition: 5% – 95% relative humidity, non-condensing environment.
Protection Class: IP20, only for installation inside sealed electrical cabinets.
Core Functions: Optical interference signal demodulation, real-time displacement computation, built-in automatic cyclic error compensation, hardware synchronized data output, on-board self-diagnosis and fault alarm. Output measurement data to motion controllers to realize high-precision closed-loop positioning.
Electromagnetic Compatibility: Complies with EN 61326-1 industrial EMC standards, effectively resisting electromagnetic interference inside semiconductor equipment cabinets.
Structural Advantages: Front panel integrated LED status indicators for power, communication and channel faults, facilitating rapid on-site troubleshooting. Standard pluggable design simplifies maintenance and replacement.
Application Compatibility: Optimized for wafer processing equipment, precision gantry systems and reticle positioning platforms; supports seamless data interaction with mainstream motion control systems.